Scheme Layout and Optimization Strategies for the Mechanical Structure Design of Semiconductor Probe Stations

Abstract

This paper investigates the mechanical structural design of semiconductor probe stations. It presents the overall system architecture, functional module integration, and optimized layout schemes, including the selection and calculation of moving components and precision-retention mechanisms. A dedicated test platform is established to evaluate system performance. Experimental results demonstrate that a simulation-driven design approach enables the achievement of high-precision performance, effectively reduces thermal drift, and satisfies the testing requirements of semiconductor wafers. The proposed design provides a valuable reference for the research and development of similar semiconductor testing equipment.